Ultraviolet Sciences Inc. UVS Series Water Purification Systems Greatly Reduce TOC's And Urea
Ultraviolet Sciences Inc. (UVSI), manufacturer of a new generation of innovative UV water treatment solutions, has introduced a specialty line of UV water treatment chambers specifically designed to reduce TOC's and Urea in process water.
"Our specially designed UVS2XX series have shown unsurpassed performance in reducing TOC's and Urea in process water", says Dr. J.R. Cooper, President of UVSI. "Our patented flow channel design takes into account the limited penetration capability of the crucial 185 nanometer UV wavelength in water. What we are able to achieve is complete illumination of all the water throughout our flow channel with the 185 nm light. Impurities at the outer wall of the flow channel are constantly bombarded by this crucial TOC busting UV energy."
Photolithography is a major beneficiary of this performance. Photolithography is the most critical step in the manufacturing process for sub-100 nm devices. As the semiconductor industry continues to push to smaller device geometries the wavelength of light used in the lithographic process is moving to lower wavelengths and increasingly higher energy levels. As device geometry decreases, contamination control becomes increasingly a more difficult issue to manage. Urea, in particular, is a significant concern and becoming a growing problematic contaminant for photolithography.
Ron Chaffee, VP of Business Development adds: "Ultrapure water production has a new tool to increase the purity of semiconductor process water. The challenge of manufacturing the new 35 nanometer devices requires this level of performance. The UVS2XX series meets this challenge. This series is also an excellent choice for Point of Use applications, and waste water reclamation."
UVSI designs, manufactures and sells UV systems for commercial and industrial industries with emphasis in the beverage, semiconductor, pharmaceutical, waste water, and water reclamation sectors. With the release of the UVS2XX series of UV water treatment equipment, UVSI offers the semiconductor industry a unique product that reduces TOC's and Urea, while also saving energy, space, and operational cost that are unparalleled in the industry. For more information visit www.uvsciences.com
SOURCE: UV Sciences Inc.