Source: Sun Chemical Advanced Materials
The eFLOW Series controls the specific resistance value of ultra-pure water by supplying carbon dioxide through a hollow fiber gas permeable membrane uniquely developed by DIC. This makes it possible to avoid dust re-adhering, and to prevent static electricity damage to the substrate pattern.
- The simple structure results in few breakdowns.
- With the unique pipe distribution system, the specific resistance value is easily controlled and has excellent stability.
- Long lifespan of the carbon dioxide gas injection module. (5 year warranty, manufactured by DIC)