LGR-ICOS 927S: Industrial Trace Gas Analyzers

The LGR-ICOS™ industrial trace gas analyzer was designed to perform to the most demanding of our customers’ requirements with the highest sensitivity, accuracy, precision and response times:

• Leak detection for personnel safety
• Airborne contamination monitoring
• Front Opening Unified Pod (FOUP) and vapor deposition chamber monitoring
• Regulatory-compliant emissions and stack gas monitoring

Key Features

• Available in single or multi-gas configurations of HF, HCI, NH₃
• All LGR-ICOS Model 927S analyzers also report accurate and precise H₂O measurements
• 0 to 5 V and analog 4 to 20 mA outputs standard and Modbus optional
• Optimized data processing for best performance in measuring sub-ppb concentrations
• Primary password protection for analyzer and data security
• Customizable Calibration & Performance

Certification Document Packages Available

• Touchscreen digital display for gas concentration and analyzer status
• Optimized zero-air performance for reliable confirmation of process events