LGR-ICOS 927S: Industrial Trace Gas Analyzers
Source: ABB Measurement & Analytics
The LGR-ICOS™ industrial trace gas analyzer was designed to perform to the most demanding of our customers’ requirements with the highest sensitivity, accuracy, precision and response times:
- Leak detection for personnel safety
- Airborne contamination monitoring
- Front Opening Unified Pod (FOUP) and vapor deposition chamber monitoring
- Regulatory-compliant emissions and stack gas monitoring
Key Features
- Available in single or multi-gas configurations of HF, HCI, NH₃
- All LGR-ICOS Model 927S analyzers also report accurate and precise H₂O measurements
- 0 to 5 V and analog 4 to 20 mA outputs standard and Modbus optional
- Optimized data processing for best performance in measuring sub-ppb concentrations
- Primary password protection for analyzer and data security
- Customizable Calibration & Performance
Certification Document Packages Available
- Touchscreen digital display for gas concentration and analyzer status
- Optimized zero-air performance for reliable confirmation of process events
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